http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106153982-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 |
| filingDate | 2015-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106153982-B |
| titleOfInvention | A kind of MEMS acceleration transducer and preparation method thereof |
| abstract | The present invention provides a kind of MEMS acceleration transducer and preparation method thereof, which includes: substrate；For measuring the compound torsional pendulum type plate electrode of the acceleration perpendicular to substrate surface direction, it include: the first vibrating diaphragm, hanging by the first supporting beam and the support of the second supporting beam that are symmetrically disposed on the first vibrating diaphragm two sides, the line of the first supporting beam and the second supporting beam is close to one end of the first vibrating diaphragm；First sub-electrode and second sub electrode are arranged at intervals on the surface of the first vibrating diaphragm；Second vibrating diaphragm, supported by the third supporting beam and the 4th supporting beam that are symmetrically disposed on the second vibrating diaphragm two sides it is hanging, the line of third supporting beam and the 4th supporting beam in the horizontal direction in close to the first vibrating diaphragm the other end；Third sub-electrode and the 4th sub-electrode, are arranged at intervals on the surface of the second vibrating diaphragm.MEMS acceleration transducer of the invention includes the compound torsional pendulum type plate electrode for measuring the acceleration of Z axis, and the sensitivity of acceleration transducer can be made to significantly improve. |
| priorityDate | 2015-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913 |
Total number of triples: 11.