http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106067652-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-034 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-034 |
| filingDate | 2016-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106067652-B |
| titleOfInvention | Dual-wavelength antireflection film for excimer laser and optical film thickness monitoring system |
| abstract | The invention discloses a dual-wavelength antireflection film for excimer laser and an optical film thickness monitoring system for preparing the antireflection film, which are applied to an excimer laser instrument compatible with deep ultraviolet 193nm and 248 nm. A dual-wavelength antireflection film for excimer laser comprises a substrate and a multilayer film which is sequentially arranged on the substrate and is formed by alternately arranging high-refractive-index films and low-refractive-index films; the high-refractive-index film is lanthanum fluoride, and the low-refractive-index film is magnesium fluoride; the number of layers of the multilayer film is 4-10. An optical film thickness monitoring system comprises an electron beam evaporation source, a thermal resistance evaporation source and a plated substrate, wherein baffle plates are arranged between the electron beam evaporation source and the thermal resistance evaporation source and between the electron beam evaporation source and the plated substrate. The dual-wavelength antireflection film for the deep ultraviolet excimer laser not only has very low residual reflectivity of the substrate surface at the wavelengths of 193nm and 248nm, but also has the lowest absorption scattering loss. |
| priorityDate | 2016-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.