http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106067442-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32926 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32899 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2016-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106067442-B |
| titleOfInvention | Cobalt deep etching |
| abstract | The present invention relates to cobalt deep etching. A method of etching cobalt on a substrate is provided. Some methods include exposing the substrate to a boron-containing halide gas and additive, and exposing the substrate to an activating gas and plasma. The additive facilitates the selective deposition of a thicker layer of boron-containing halide material on the surface of the mask than the layer of boron-containing halide material deposited on the surface of the metal. Additives include H 2 , CH 4 , CF 4 , NF 3 , and Cl 2 . Boron-containing halide gases include BCl 3 , BBr 3 , BF 3 , and BI 3 . Exposures may be performed in two or more cycles, where the duration and bias power of each exposure are variable. |
| priorityDate | 2015-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.