http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106062509-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-0634 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8812 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-95684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H04N23-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 |
| filingDate | 2014-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106062509-B |
| titleOfInvention | Apparatus and method for selectively inspecting sidewalls of components |
| abstract | The present invention relates to a component inspection process that includes positioning a component (eg, a semiconductor component or other object) such that component sidewalls are disposed along an optical path corresponding to a sidewall beam splitter configured to use for receiving sidewall illumination provided by a set of sidewall illuminators and passing the sidewall illumination therethrough towards the component sidewall and to the component sidewall. Sidewall illumination incident on the sidewall of the component is reflected back from the sidewall of the component toward a sidewall beam splitter that is reflected or redirected along an optical path corresponding to the image capture device used for sidewall image capture This reflected sidewall illumination allows for component sidewall inspection. The sidewall illuminator and sidewall beam splitter may form part of five side inspection devices including a bright field illuminator, a dark field illuminator, and an image capture beam splitter, such that the five side inspection devices may be configured for use with Optional/alternative means to inspect part bottom surfaces and/or part side walls. |
| priorityDate | 2013-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359775 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453115953 |
Total number of triples: 21.