| abstract |
The subject of the invention is to provide coating fluids use instead of previous flushing liquor, to be coated on resist pattern.Solution of the invention is a kind of coating fluid for being coated on resist pattern, and containing polymer and solvent, the polymer has structural unit shown in following formula (1), and the solvent contains water and/or alcohols, (in formula (1), R 1 Indicate that carbon atom number is 1~12 organic group, X indicates organic group shown in following formula (2). In formula (2), R 2 And R 3 Separately indicate the alkylidene that the carbon atom number of straight-chain or branched is 1~3, the R 2 In conjunction with the oxygen atom in previously described formula (1), R 4 Indicate that carbon atom number is 1~4 alkoxy, allyloxy or hydroxyl, p indicates 0,1 or 2.). |