http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106030297-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-0027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-125 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2014-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106030297-B |
| titleOfInvention | Integrated gas sensors and related manufacturing process |
| abstract | A kind of integrated gas sensors with tungsten or tungsten oxide gas-sensing element, are provided with the substrate of semiconductor material；And the structure of multiple interconnection layers, arrangement are constituted on substrate and by the conductive layer of multiple stackings and dielectric layer.Gas-sensing element is integrated in the structure of multiple interconnection layers, and at least one electrode arrangement is electrically connected to gas-sensing element and is designed to provide current to gas-sensing element, to heat gas-sensing element in the structure of multiple interconnection layers. |
| priorityDate | 2013-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.