http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106024690-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32 |
| filingDate | 2016-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106024690-B |
| titleOfInvention | Electrostatic chuck system |
| abstract | An electrostatic chuck system is provided. The electrostatic chuck system includes: a platform in which a first electrode and a second electrode are arranged, the first electrode has a first polarity, and the second electrode has a second polarity different from the first polarity; a display substrate on the platform , the display substrate includes pixel electrodes on its surface; and an optical mask over the surface of the display substrate, the optical mask including a reflective layer and a transfer layer to be transferred to the display substrate, wherein the display substrate has a first One of the first polarity and the second polarity, and the optical mask has the other of the first polarity and the second polarity. |
| priorityDate | 2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.