http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106011785-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45529 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2016-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106011785-B |
| titleOfInvention | A kind of atomic layer deposition preparation high uniformity Nb doping TiO2The method of transparent conductive film |
| abstract | The present invention relates to a kind of atomic layer depositions of photoelectric semiconductor material technical field to prepare high uniformity Nb doping TiO 2 The method of transparent conductive film is heated by the substrate that nitrogen after being cleaned by ultrasonic dries up, using titanium tetrachloride, three（Ethylmethylamino）T-butyl carboxamide niobium and high purity water carry out Sedimentary Assemblages to prepare high uniformity Nb doping TiO after repeatedly recycling as precursor source 2 Transparent conductive film.The transparent conductive film that the invention is prepared is had excellent performance, and for refractive index 2.3 or more, resistivity is minimum up to 2.9 × 10 ‑4 Ω cm, light transmittance is still 85% or more at this time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594600-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594450-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776846-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11557474-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D979506-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781243-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D975665-S |
| priorityDate | 2016-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.