http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105981482-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate | 2014-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105981482-B |
| titleOfInvention | Apparatus and method for source material delivery in a laser-generated plasma EUV light source |
| abstract | An apparatus and method are disclosed in which gas is induced to flow parallel to the flow of source material to form a gas hood. The gas hood can protect the flow of source material from being disrupted by the cross-flow of gas. The gas hood can also limit the heating of the physical hood through which the source material passes and limit the accumulation of the source material on the physical hood by deforming the plasma bubble formed during irradiation of the source material so that the plasma bubble does not come too close to the physical hood . Apparatus and methods are also disclosed for establishing additional cross-flow of gas such that the gas hood does not cause source material contamination of optics used to collect light generated during irradiation of the source material. |
| priorityDate | 2013-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.