| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 |
| filingDate |
2016-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6e719e0d359fd64208c075d39a9d16f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c3dcb12ca774ddcd5dfd88d3661265a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b01ee05c96245bf3c7a4618e59044321 |
| publicationDate |
2016-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105970223-A |
| titleOfInvention |
Etchant composition and manufacturing method of array substrate for liquid crystal display |
| abstract |
Disclosed are an etchant composition and a manufacturing method of an array substrate for a liquid crystal display. The etchant composition contains precious metal chemical complex, so shows a catalysis effect. Therefore, an amorphous silicon layer which is etched by a dry method or an amorphous silicon layer containing dopants can be further etched together with a metal wire by using a wet process etching technology. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109112539-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106601614-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110396693-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110396693-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108930037-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114164003-A |
| priorityDate |
2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |