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filingDate 2016-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-105810751-B
titleOfInvention Thin film transistor substrate and method of manufacturing thin film transistor substrate
abstract Provided are a thin film transistor substrate and a method of manufacturing the thin film transistor substrate. The thin film transistor substrate comprises: a gate electrode; a channel layer overlapping the gate electrode; a source electrode overlapping the channel layer; a drain electrode overlapping the channel layer and the source electrode; and a spacer disposed on the source electrode between the drain electrode.
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