http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105789086-B
Outgoing Links
Predicate | Object |
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classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
filingDate | 2014-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-105789086-B |
titleOfInvention | A kind of device of chip double-side scaling powder coating |
abstract | The present invention provides a kind of devices of chip double-side scaling powder coating, it include: workbench, wafer or baseplate material, chip accurate operation device, the first applicator head, upper optometry system, the second applicator head and lower optometry system, wherein chip accurate operation device adsorbs chip in the first operating position, first applicator head moves to the first operating position, and scaling powder is applied in chip first sideï¼›Continue absorption chip and the second operating position is moved to by the first operating position, by upper optometry system to the coating effect inspection of chip first side, if the coating effect in chip first side meets technique requirement, it then adsorbs chip and third operating position is moved to by the second operating position, and it will be in chip first side attachment to workbench wafer or baseplate material, again by chip motion to the 4th operating position, scaling powder is applied on the second face of chip by the second applicator head, and after the completion of coating, second applicator head leaves the 4th operating position, effect is applied by lower optometry systems inspection. |
priorityDate | 2014-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 |
Total number of triples: 12.