http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105777079-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-10 |
| filingDate | 2016-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105777079-B |
| titleOfInvention | Resistant to plasma etches ceramic body and its manufacturing method, plasma etching equipment |
| abstract | The invention discloses a kind of resistant to plasma etching ceramic body and preparation method thereof and plasma etching equipments.Resistant to plasma etching ceramic body of the present invention is by being fired acquisition after alumina powder compression molding processing, wherein contains inevitable impurity component in the alumina powder, and the mass content of the impurity component is no more than 0.001%.Resistant to plasma etching ceramic body resistant to plasma corrosive nature of the present invention is high, and preparation method enables to the resistant to plasma etching ceramic body resistant to plasma corrosive nature of preparation high, dimensionally stable, and density is high.The alumina ceramic component constituted in the etching cavity of plasma etching equipment of the present invention equipped with resistant to plasma of the present invention etching ceramic body.Therefore, alumina ceramic component resistant to plasma corrosive nature is good, so that the wafer yield that etching obtains is high, and effectively extends the service life of alumina ceramic component. |
| priorityDate | 2016-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717 |
Total number of triples: 14.