http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105699920-A

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filingDate 2016-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2016-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-105699920-A
titleOfInvention An area array giant magnetoresistive magnetic sensor and its manufacturing method
abstract The invention discloses an area array giant magnetoresistance magnetic sensor and a manufacturing method thereof, comprising a data acquisition and processing unit and a giant magnetoresistance array. The data acquisition and processing unit includes a power module, an address selector, an analog front end and an analog-to-digital converter; the power module is connected to the giant magnetoresistive array through the address selector, and the giant magnetoresistance The resistive array includes 256 giant magnetoresistive magnetic sensors in the form of meandering resistors with a nano-multilayer film structure, forming a giant magnetoresistive array in the form of a 16*16 area array. The present invention is based on the standard CMOS integrated circuit technology. First, the external data acquisition and processing unit circuit is separately processed. After the external circuit is processed, the giant magnetoresistive array is processed by two-step photolithography. The area array giant magnetoresistive magnetic sensor of the invention can realize accurate high-speed synchronous detection of the planar magnetic field, and is miniaturized, highly integrated, compatible with product technology, and convenient for mass production.
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Total number of triples: 40.