| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6a6f422b091ba12ea61d4adbf1b0e8e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-33 |
| filingDate |
2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd767cf16aa4b8375a9743d8a9e74333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02d05206f2109c4af19151b01df7d211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b1659f849581846d118ce2c16d60c7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fcec6ae65baf90562683f5e5f72d92c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46e74db5767987ceb3c00126e10e169d |
| publicationDate |
2016-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105679929-A |
| titleOfInvention |
Manufacturing method and device for coating piezoelectric element film based on ultrasonic standing wave field |
| abstract |
The invention discloses a method and a device for manufacturing a film covering a piezoelectric unit based on an ultrasonic standing wave field. There are two pairs of copper interdigital electrodes arranged orthogonally on the lithium niobate wafer. The interdigital electrodes and the lithium niobate wafer form an interdigital transducer. The PDMS microchannel covers the center of the lithium niobate wafer. PDMS The photosensitive piezoelectric mixture is evenly distributed in the microchannel, and the ultraviolet light source is placed under the lithium niobate wafer; two pairs of interdigital transducers excite surface acoustic waves on the lithium niobate wafer, and four columns of traveling waves cover the PDMS microchannel. The area is superimposed to form a stable two-dimensional standing wave field. The piezoelectric particles in the photosensitive piezoelectric mixture move to the nodes of the sound field under the action of the acoustic radiation force, thereby forming piezoelectric units arranged in an array. After the piezoelectric units are arranged stably , using an ultraviolet light source to irradiate the photosensitive piezoelectric mixture to make it cross-linked and solidified. The invention has the characteristics of high precision, simple and convenient operation, strong controllability, high productivity and the like. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111570208-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108153109-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110265424-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109734045-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109734045-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111254076-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110587977-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111570208-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109540771-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114524407-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112588222-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106821543-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106821543-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106934234-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111969975-A |
| priorityDate |
2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |