http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105590873-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11614 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 |
| filingDate | 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105590873-B |
| titleOfInvention | A kind of preparation method of dry etching convex block morphology controllable |
| abstract | The invention discloses a kind of preparation methods of dry etching convex block morphology controllable, include the following steps：Adhere to oxide layer (oxide) deielectric-coating on substrate；Photoresist PR in spin coating, is then exposed, develops on oxidation layer dielectric；Photoresist PR is toasted, photoresist PR is made to form fixed pattern and thickness；Using RIE dry etchings, CF is used 4 And CHF 3 Combination of gases performs etching deielectric-coating；Keep CF 4 And CHF 3 Total gas flow rate it is constant, adjust CF 4 And CHF 3 The ratio of gas, so as to obtain the selection of certain oxide and PR ratio；It is fixed in PR patterns and thickness in deielectric-coating etching process by the selection ratio of specific oxide and PR, the PR of two shoulders is gradually used up, trapezoid is presented so as to reach deielectric-coating etching, finally obtains the convex block shape of bottom slope morphology controllable.This method technology of preparing is simple, and the convex block morphology controllable of preparation, repeatability are good. |
| priorityDate | 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291 |
Total number of triples: 14.