| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b74e149091c89a4825ef0db8d431755 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-683 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68728
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 |
| filingDate |
2015-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e33cc5af50c43aca39faf550e2fde0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b27c43f784aeef23aaa432e20712a28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_426a2dc79b8996259c85b8f0510e5918 |
| publicationDate |
2016-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105575874-A |
| titleOfInvention |
Fixture components |
| abstract |
According to the present invention, there is provided a clamp assembly for clamping a peripheral portion of a substrate to a support in a plasma processing chamber where radio frequency (RF) bias power is applied to the substrate In a plasma processing chamber of the type applied to the support during plasma processing, the clamp assembly includes: an outer clamp member; and an inner clamp member received by the outer clamp member, the An inner clamp member defines an aperture for exposing the substrate to plasma processing; wherein the outer clamp member has an inner portion terminating in an inner edge, wherein the inner portion is spaced apart from the inner clamp member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106024567-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111613506-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111613506-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106024567-B |
| priorityDate |
2014-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |