| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6635a0116bafd2c08a0c99b78e132e99 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-549
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K2102-311 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K77-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8423 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| filingDate |
2014-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9514288feb32182211abc7dbedf572b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_777905c7ec9765bd58f404fd588df794
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bf09a8e0ad8b42fae0cc1207cb74166 |
| publicationDate |
2016-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105556698-A |
| titleOfInvention |
Method for deposition of high performance coatings and packaged electronic devices |
| abstract |
A method for forming a multilayer structure on a polymer or other material that provides optical functionality or protects an underlying layer from exposure to oxygen and water vapor is disclosed. Novel devices are also disclosed which may include multilayer protective structures and AMOLED display, OLED lighting or photovoltaic devices. The protective multilayer structure itself can be produced by successively depositing on the substrate at least three very thin layers of material having different densities or compositions. In some methods of depositing such films, layers are deposited by varying the energy of ion bombardment per unit thickness of the film. Any layer of the structure may comprise one or more of the following materials: silicon nitride, silicon oxide, silicon oxynitride, or metal nitrides or oxides. Specific commercial uses that would benefit from this include the fabrication of photovoltaic devices or organic light emitting diode (OLED) devices including lighting and displays. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020082478-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108269827-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109509844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110752308-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109411417-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109411417-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112996945-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10644259-B2 |
| priorityDate |
2013-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |