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filingDate 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-105543804-B
titleOfInvention A kind of uniformity control method in titanium alloy light shield growth inside CNT
abstract A kind of uniformity control method in titanium alloy light shield growth inside CNT, step are:(1) titanium alloy light shield is heat-treated under high temperature and process gas existence condition, on titanium alloy light shield surface, the projection of the carbon containing titanium compound of formation rule, is then aoxidized;(2) titanium alloy light shield is immersed in tetraethyl orthosilicate or tetraethyl titanate neat liquid and reacted, be then passed through water or water vapour to inner chamber and heat, silica or titanium oxide layer are formed in titanium alloy light shield surface of internal cavity;(3) titanium alloy light shield is put into the cavity reactor with feed pipe, then heated cavity reactor;(4) carbon source and metal precursor are passed through by cavity reactor by feed pipe simultaneously, the different parts in titanium alloy light shield inner chamber decompose and deposition of carbon nanotubes array;(5) apply plasma field simultaneously on the outside of reactor, stop logical carbon source after reaction, close temperature elevation system, be passed through inert gas, final products are taken out after room temperature is down to.
priorityDate 2015-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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