http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105526983-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-6845 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-684 |
| filingDate | 2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105526983-B |
| titleOfInvention | A kind of structure and its manufacturing method of gas flow sensor |
| abstract | The invention belongs to MEMS manufacturing process technology fields, disclose the structure and its manufacturing method of a kind of gas flow sensor, it includes the heater resistance with third ion doping concentration, first group of upstream and downstream semiconductor heat electrode with the second ion doping concentration, second group of upstream and downstream semiconductor heat electrode with the first ion doping concentration, wherein, the second ion doping concentration and third ion doping concentration are greater than the first ion doping concentration.The present invention provides a kind of structure of gas flow sensor and its manufacturing methods, increase by one group of upstream and downstream thermocouple on conventional device structure, the upstream and downstream semiconductor heat electrode of two groups of different ions doping concentrations is respectively formed in the upstream and downstream of air-flow, it is calculated by voltage difference, the influence that basic neutralisation semiconductor material Seebeck coefficient varies with temperature, it changes linearly reference data with temperature difference, is conducive to the detection sensitivity and accuracy that improve gas temperature and flow. |
| priorityDate | 2015-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.