| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1809
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-382 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2015-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105511225-B |
| titleOfInvention |
Photo-corrosion-resisting agent composition and the correlation technique for forming electronic device |
| abstract |
The present invention relates to the correlation techniques of a kind of photo-corrosion-resisting agent composition and formation electronic device.Photo-corrosion-resisting agent composition includes first polymer, and the repetitive unit of wherein at least half is that light acid generates repetitive unit；And second polymer, show the variation of solubility in alkaline developer under the action of an acid.In the first polymer, the light acid generates each of repetitive unit and generates functional group and alkali solubility enhancing functional group comprising light acid. |
| priorityDate |
2014-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |