| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2201-06113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1702
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2014-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105453243-B |
| titleOfInvention |
Optoacoustic substrate assessment system and method |
| abstract |
Disclosed herein is a kind of for identifying the system and method formed to the one or more features of the structure in substrate.Surface acoustic wave and bulk acoustic wave are induced in the substrate and it is made to be advanced through the interested structure for wherein sensing the sound wave.The information related with the one or more features of the structure is encoded in the ripple.Encoded information is assessed to determine the interested feature. |
| priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |