abstract |
The invention belongs to the field of magnetic sensor manufacturing. Specifically, the present invention relates to a magnetic thin film structure, its manufacture and use method, and a magnetic sensitive sensing unit and array. The nano-magnetic thin film structure and the three-dimensional magnetic sensitive sensing unit or the three-dimensional magnetic sensitive sensor provided by the present invention adopt a single structure to deposit and form a film at one time, and the integrated three-dimensional magnetic sensitive sensing unit and magnetic sensitive sensor can be obtained by only one micro-nano graphic processing. It not only has the advantages of simple processing and low cost, but also greatly improves the integration degree, device stability and repeatability of the three-dimensional magnetic sensor, which is significantly better than the existing three-dimensional magnetic sensor technology. |