http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105449096-A

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publicationDate 2016-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-105449096-A
titleOfInvention Magnetic thin film structure and its manufacture, use method and magnetic sensitive sensing unit, array
abstract The invention belongs to the field of magnetic sensor manufacturing. Specifically, the present invention relates to a magnetic thin film structure, its manufacture and use method, and a magnetic sensitive sensing unit and array. The nano-magnetic thin film structure and the three-dimensional magnetic sensitive sensing unit or the three-dimensional magnetic sensitive sensor provided by the present invention adopt a single structure to deposit and form a film at one time, and the integrated three-dimensional magnetic sensitive sensing unit and magnetic sensitive sensor can be obtained by only one micro-nano graphic processing. It not only has the advantages of simple processing and low cost, but also greatly improves the integration degree, device stability and repeatability of the three-dimensional magnetic sensor, which is significantly better than the existing three-dimensional magnetic sensor technology.
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priorityDate 2015-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 45.