http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105448636-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0206 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32798 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2015-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105448636-B |
| titleOfInvention | Plasma processing apparatus, method of plasma processing and the method for manufacturing electronic device |
| abstract | The present invention relates to a kind of plasma processing apparatus, method of plasma processing and the method for manufacturing electronic device.In induction coupled plasma torch unit, coil, the first ceramic block and the second ceramic block chamber arranged parallel to each other and elongated are ring-type.Caused plasma is sprayed by the opening portion in chamber to substrate in chamber.By making elongated chamber and substrate be relatively moved along the direction vertical with the longitudinal direction of opening portion to handle substrate.Make the cavity that refrigerant flow direction ceramic tube inside is formed by setting the cylindric earthenware of rotation.Thus, it is possible to apply higher high frequency power, quick corona treatment is thus allowed for. |
| priorityDate | 2014-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520721 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74123 |
Total number of triples: 18.