http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105420683-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0254 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
| filingDate | 2015-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105420683-B |
| titleOfInvention | The device of nano-multilayer film is prepared based on low-voltage plasma chemical vapor deposition |
| abstract | The present invention provides a kind of devices preparing nano-multilayer film based on low-voltage plasma chemical vapor deposition, including：Reaction chamber for the vacuum for placing substrate work-piece；The oxygen delivery system of sustainable supply oxygen into the reaction chamber；The gas delivery system of first gas and second gas is alternately supply into the reaction chamber；It generates microwave and the microwave generation system of the microwave is provided into the reaction chamber；It is set between the reaction chamber and the microwave generation system to generate argon-arc plasma field in the reaction chamber to ionize the various gases in the reaction chamber so as to be chemically reacted and generated the microwave electron cyclotron resonance system of nano thick film between each gas different molecular.The device of the invention can accurately control every layer thickness and the uniformity, increase film layer and substrate adhesive power. |
| priorityDate | 2015-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.