http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105418926-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-24 |
| filingDate | 2014-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105418926-B |
| titleOfInvention | A kind of fluorine-containing naphthylethyl silicones and its preparation method and application |
| abstract | The invention discloses a kind of fluorine-containing naphthylethyl silicones and its preparation method and application.Colloidal sol is made by condensation reaction using fluorine-containing naphthylethyl organic silicon monomer, alkyl trichlorosilane, alkyl dichlorosilane as starting material in the present invention；Gained sol solution is spun on silicon chip, then heating makes its film-forming, obtains fluorine-containing naphthylethyl silicones；It can also be by being made annealing treatment to film, further to improve the electrology characteristic of fluorine-containing naphthylethyl silicones.The comprehensive performance of fluorine-containing naphthylethyl silicones can be changed by the ratio of the fluorine-containing naphthylethyl organic silicon monomer of change, alkyl trichlorosilane, alkyl dichlorosilane, comply with different demands of the people to advanced low-k materials.The dielectric constant of fluorine-containing naphthylethyl silicones can reach 2.0~2.5 in the present invention, therefore can be used as the advanced low-k materials on 45nm great scale integrated circuits below.The preparation method of the fluorine-containing naphthylethyl silicones is simple, is conducive to industrialized production. |
| priorityDate | 2014-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 53.