| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2011-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2909-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-34 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29D11-0074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C41-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C35-0888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B7-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3842
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-424 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 |
| filingDate |
2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105408265-B |
| titleOfInvention |
The manufacture method of cylindrical base member material, former disk and former disk |
| abstract |
The manufacture method for being capable of equably the cylindrical base member material of replicated fine pattern, former disk and former disk is provided.Using being made up of the quartz glass of drum and internal strain is using double refraction amount as the cylindrical base member material less than 70nm/cm（11）.In the cylindrical base member material（11）Outer surface film forming resist layer, and form latent image in resist layer, make to be formed the development of the resist layer of latent image, and be etched using the pattern of the resist layer of development as mask, formed by cylindrical base member material（11）Outer surface arrange multiple recess or structure that convex portion is formed（12）. |
| priorityDate |
2013-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |