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filingDate 2014-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-105374833-B
titleOfInvention Imaging sensor and the method for imaging sensor manufacture
abstract Present application is related to a kind of imaging sensor and the method manufactured for imaging sensor.A kind of imaging sensor includes placement multiple photodiodes in the semiconductor layer and the multiple deep trench isolation regions being placed in the semiconductor layer.The multiple deep trench isolation region includes:(1) oxide skin(coating) is placed on the inner surface of the multiple deep trench isolation region;And (2) conductive filler, it is placed in the multiple deep trench isolation region, wherein the oxide skin(coating) is placed between the semiconductor layer and the conductive filler.Multiple pinning traps are also placed in the semiconductor layer, and the multiple pinning trap combines the individual photodiode in the multiple photodiode of the multiple deep trench isolation region separation.Fixed charge layer is placed on the semiconductor layer, and the multiple deep trench isolation region is placed between the multiple pinning trap and the fixed charge layer.
priorityDate 2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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