http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105304524-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1699e3503680214e874e57ffe561d889 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P10-20 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2014-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c89d93de62b90d7dd75f93414151c452 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ac6494a8864080f23a04c466fa0ab14 |
| publicationDate | 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105304524-A |
| titleOfInvention | Etching liquid management device, and concentration determination device and concentration determination method of dissolved metal |
| abstract | The present invention provides an etching liquid management device, and a concentration determination device and concentration determination method of dissolved metal, configured to monitor the ingredient concentration of etching liquid and the concentration of a dissolved metal to automatically supply a replenisher in a constant ingredient concentration mode and perform separation and recovering of the dissolved metal. The etching liquid management device comprises: a first physical property value determination mechanism configured to measure a first physical property value with respect to the concentration of acid in the etching liquid; a second physical property value determination mechanism configured to a second physical property value with respect to the concentration of the dissolved metal; a replenisher transmission control mechanism configured to control the transmission of the replenisher based on the relation between the concentration of the acid and the first physical property value and the determination result of the first physical property value; and a dissolved metal recovery removal mechanism configured to recycle and remove the dissolved metal based on the relation between the concentration of the dissolved metal and the determination result of the second physical property value. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105845604-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115558930-A |
| priorityDate | 2014-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.