http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105283516-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D11-037 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D11-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D11-50 |
| filingDate | 2014-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2018-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105283516-B |
| titleOfInvention | Design and/or management method for the indicator and the device of electronic device manufacture device |
| abstract | The design and/or management method of a kind of device it is an object of the invention to provide indicator and using above-mentioned indicator, the indicator can easily detect whether equably integrally to have carried out selected from least one processing for including plasma, ozone, ultraviolet and the group containing hydroxyl radical gas substrate in electronic device manufacture device.A kind of indicator, it is the indicator used in electronic device manufacture device, it is characterized in that, (1) indicator, which is used to detect to be selected from, includes plasma, ozone, ultraviolet, and at least one of the group containing hydroxyl radical gas, (2) shape of substrate of the shape of the indicator with being used in the electronic device manufacture device is identical, (3) indicator includes photochromic layer, (4) photochromic layer is formed by ink composition, the ink composition by with selected from including plasma, ozone, ultraviolet, and at least one of the group containing hydroxyl radical gas reacts and changes colour or decolourize. |
| priorityDate | 2013-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 227.