http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105280699-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0847 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0692 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-165 |
filingDate | 2014-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2018-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2018-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-105280699-B |
titleOfInvention | Source/drain structures and forming method thereof |
abstract | The present invention provides semiconductor devices, which includes being arranged on the gate stack above substrate and source/drain (S/D) component being partially embedded into the substrate of adjacent gate stack.S/D components include:First semiconductor material layer and the second semiconductor material layer being arranged on above the first semiconductor material layer.Second semiconductor material layer is different from the first semiconductor material layer.S/D components also include being arranged on the 3rd semiconductor material layer above the second semiconductor material layer, and the 3rd semiconductor material layer includes tin (Sn) material.The present invention also provides the forming methods of S/D components. |
priorityDate | 2014-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.