Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823864 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0847 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-267 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092 |
filingDate |
2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2019-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2019-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-105280641-B |
titleOfInvention |
Structures and methods for integrated circuits |
abstract |
The present invention provides many different embodiments of an IC device. The IC device includes a gate stack disposed over a surface of the substrate and spacers disposed along sidewalls of the gate stack. The spacer has a surface facing the substrate while tapering edges that taper toward the gate stack. Therefore, the tapered edge is angled relative to the surface of the substrate. The present invention also provides a method of manufacturing a semiconductor integrated circuit (IC) device. |
priorityDate |
2014-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |