| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-101 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D201-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D201-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2014-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105255246-B |
| titleOfInvention |
Finish compositions and photolithography method |
| abstract |
Finish compositions provided by the invention can be used in immersion type photolithography to form photoresist figure.The finish compositions include solvent system, which includes the first organic solvent 1) indicated by chemical formula (I), Wherein R1 and R2 is the alkyl of 3-8 carbon and the total number of the carbon of R1 and R2 is greater than 6；And 2) the second organic solvent, second organic solvent are C4 to C10 monohydric alcohol. |
| priorityDate |
2013-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |