| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2014-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105247663-B |
| titleOfInvention |
Etch combination |
| abstract |
The present invention provides a kind of etch combination, and it contains salt and solvent comprising anion and cation, and the anion has the structure that fluorine atom is formed with phosphorus atoms with singly bound. |
| priorityDate |
2013-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |