http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105241505-B
Outgoing Links
Predicate | Object |
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classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01D21-02 |
filingDate | 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-105241505-B |
titleOfInvention | Pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device |
abstract | The invention discloses a pressure and flow velocity multi-parameter measuring device and method based on a single Lamb wave device. The pressure and flow velocity multi-parameter measuring device comprises: a channel pedestal, which has a first groove and a Lamb wave sensor placed in the first groove; a channel upper plate, which covers the channel pedestal, wherein the bottom surface of the channel upper plate is equipped with a fluid inlet/outlet and a channel; a test circuit board, which covers the channel upper plate and is equipped with an interface that is connected to an external tester; and elastic probes, wherein one end of each elastic probe is electrically connected to the test circuit board and the other end of each elastic probe passes through the channel upper plate and keeps extending to form an elastic contact. The Lamb wave sensor is equipped with, from bottom to top, a silicon substrate layer, a ground electrode, an aluminium nitride film and an interdigital electrode in sequence. The measuring device based on a Lamb wave sensor has the characteristics of small size, high sensitivity, low loss and multiple modes. The changing magnitude and direction of pressure and flow velocity can be accurately measured by means of the characteristic that the single Lamb wave sensor has multiple modes. |
priorityDate | 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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