http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105229097-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-00 |
| filingDate | 2014-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105229097-B |
| titleOfInvention | Chemical-mechanical polishing compositions comprising polyethyleneimine |
| abstract | A kind of chemically mechanical polishing (CMP) composition of present invention description, it includes following components：(A) there is the surface modified silicon dioxide particle of 15mV or below 15mV negative zeta potential under pH value of the scope between 2 to 6, (B) one or more polyethyleneimines, (C) water, (D) choose any one kind of them or various other compositions, wherein the pH value of composition is in the range of 2 to 6. |
| priorityDate | 2013-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 64.