| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f56b5174f7d196258707ccf1d609796e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-0335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5226 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate |
2015-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f8800e84eb0bd2e63c31d8f7f53801e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_707f2fe682a01f1df7d27fc49135d9c6 |
| publicationDate |
2016-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105226060-A |
| titleOfInvention |
Semiconductor device |
| abstract |
The present invention relates to semiconductor devices. A semiconductor device having a capacitor comprising a first electrode electrically connected to a transistor and a second electrode separated from the first electrode and covered with an interlayer insulating film, wherein a plurality of connection holes are formed in the interlayer insulating film and at a lower end In contact with the second electrode; and, when the capacitance of the second electrode is represented by C[nF] and the total area of the lower end of the connection hole is represented by A[μm 2 ], the following expression (1) is satisfied, C/A≤ 1.98 [nF/μm 2 ] (1). Elution of the second electrode constituting the capacitor at the lower end of the connection hole is suppressed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111128953-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113451311-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107180830-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107180830-A |
| priorityDate |
2014-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |