| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T117-1024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T117-1016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-8477 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-35 |
| filingDate |
2014-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2019-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105189814-B |
| titleOfInvention |
Passivation of Nonlinear Optical Crystals |
| abstract |
Passivation of a nonlinear optical crystal for use in an inspection tool comprises: growing a nonlinear optical crystal in the presence of at least one of fluorine, fluoride ions, and a fluoride-containing compound; mechanically preparing the nonlinear optical crystal crystal; performing an annealing process on the nonlinear optical crystal; and exposing the nonlinear optical crystal to a hydrogen- or deuterium-containing passivation gas. |
| priorityDate |
2013-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |