http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105189045-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-32 |
| filingDate | 2014-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105189045-B |
| titleOfInvention | Workpiece polishing device |
| abstract | The present invention is a workpiece polishing device comprising a polishing cloth for polishing a workpiece, a polish supply mechanism for supplying polish, and a polishing head for holding the workpiece; the polishing head holding the back surface of the workpiece by a backing pad and holding the edge part of the workpiece by an annular template, and pressing the workpiece and the template against the polishing cloth, whereby the workpiece is rubbed against the polishing cloth and the workpiece is polished, wherein the workpiece polishing device is characterized in that the template is composed of a resin to which a filler is added or a resin in which a woven cloth is included, and minuscule concavities are formed in the surface pressing against the polishing cloth by exposing the filler or the woven cloth on the surface. A workpiece polishing device is thereby provided in which the speed of polishing the outer periphery of the workpiece is stable and the workpiece can be polished with high flatness. |
| priorityDate | 2013-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426320336 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11116966 |
Total number of triples: 15.