| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2201-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D139-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F226-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D139-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F226-10 |
| filingDate |
2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-105164172-B |
| titleOfInvention |
Composition and its method comprising heat of polymerization acid-producing agent |
| abstract |
It is coated on photoresist pattern the present invention relates to a kind of new Aquo-composition comprising heat of polymerization acid-producing agent and by the new composition, the method that heat of polymerization acid-producing agent layer is thus formed on the photoresist pattern.The heat of polymerization acid-producing agent includes the polymer of the repetitive unit at least one structure 2： |
| priorityDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |