http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105144353-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-26 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L39-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-26 |
| filingDate | 2014-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105144353-B |
| titleOfInvention | Ferroelectric thin film, which is formed, uses composition and its manufacturing method |
| abstract | The present invention provides a kind of ferroelectric thin film formation composition and its manufacturing method.Ferroelectric thin film formation of the invention is the Young's modulus that film forming is adjusted by pre-burning process and firing process with composition, and even if film each time is thicker, cracking is also hardly happened when firing and can obtain the higher film of crystallinity, improves the manufacture efficiency of film so as to reduce coating times.By using ferroelectric thin film formation composition, even if film each time is thicker, cracking is also hardly happened when firing and forms the higher film of crystallinity, the ferroelectric thin film formation composition is characterized in that, the ferroelectric thin film formation is the presoma comprising ferroelectric thin film with composition, solvent and reaction controlling substance, and the composition of ferroelectric thin film is formed by the pre-burning of film and firing, the content of above-mentioned reaction controlling substance is that the Young's modulus that forms a film in 200 DEG C~300 DEG C of pre-burning stage is 42GPa or less and the Young's modulus that forms a film in 400 DEG C~500 DEG C of firing stage becomes the amount of 55GPa or more. |
| priorityDate | 2013-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.