http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105127142-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-12 |
| filingDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105127142-B |
| titleOfInvention | A kind of laser film element super-smooth surface fused quartz optical substrate ultrasonic cleaning method |
| abstract | The present invention relates to a kind of laser film element super-smooth surface fused quartz optical substrate method for suppersonic cleaning, belong to optical technical field.The cleaning method is comprised the following steps：Before formal ultrasonic cleaning, minimum ultrasonic power, optimal ultrasonic time of the low-frequency range 80KHz supersonic frequencies to the effective removal of micrometer size granule are obtained with the substrate experiment of 1 μm ~ 3 μm artificial oxidation's silicon beads of spin coating；The optimal proportion of ammoniacal liquor, hydrogen peroxide and pure water, optimal ultrasonic time is obtained with reference to AFM when obtaining Mid Frequency 400KHz supersonic frequencies using the substrate experiment of 0.3 μm~1 μm artificial oxidation's silicon bead of spin coating；After two aspects of summary obtain optimal ultrasonic cleaning parameter, implementation carries out ultrasonic wave and finely cleans to ultra-smooth fused quartz optical substrate.The advantage of the invention is that realizing ultrasonic cleaning efficient to fused quartz optical substrate, quantitative by methods described, ultrasonic wave is avoided while realizing that substrate high-cleanness, high is cleaned and excessively cleans the super-smooth surface damage and fatigue of materials caused to base component. |
| priorityDate | 2015-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.