http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105097783-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105097783-B |
| titleOfInvention | Metal electro-migration test structure and metal electro-migration method of testing |
| abstract | The invention provides a kind of metal electro-migration test structure and metal electro-migration method of testing.Metal electro-migration test structure, position the defects of for testing metal interconnection structure, metal interconnection structure include：The first hardware cloth line segment being arranged in the first metal wiring layer and the second hardware cloth line segment and the 3rd hardware cloth line segment of the disconnection being arranged in the second metal wiring layer；Wherein, the first end of the first hardware cloth line segment is connected to the second hardware cloth line segment by the first metal throuth hole, and the second end of the first hardware cloth line segment is connected to the 3rd hardware cloth line segment by the second metal throuth hole；Metal electro-migration test structure includes：The first test pin terminal at the first end of the first hardware cloth line segment, the second test pin terminal being arranged at the second end of the first hardware cloth line segment are arranged in, the 3rd test pin terminal of the second hardware cloth line segment is arranged in and is arranged in the 4th test pin terminal of the 3rd hardware cloth line segment. |
| priorityDate | 2015-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.