| abstract |
A kind of equipment for producing plasma, including：For transporting the supporting member of moving substrate, the plasma generator for producing plasma, for making moving substrate described in the ion deflecting and directive in the plasma form the electrode of ion stream.The ion stream has the energy level being between 3.6 electron-volts to 250 electron-volts.Alternately, the equipment for being used to produce plasma has multiple track type ion accumulation regions being spaced apart. |