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filingDate 2014-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-105073333-B
titleOfInvention laser ablation platform for solar cell
abstract Multiple embodiments of the present invention are relevant with the apparatus and method for that multiple holes are formed for laser in a substrate.In one embodiment, Laser Scanning Equipment includes removable transport assembly and places the Optical devices for being adjacent to the removable transport assembly, wherein the Optical devices include polygonal mirror, actuator and lasing light emitter, the polygonal mirror has several reflection tangent planes and rotary shaft, the actuator is configured to rotate the polygonal mirror relative to the rotary shaft, and the lasing light emitter is located to guiding electromagnetic radiation at least one of polygonal mirror grade reflection tangent plane reflection tangent plane, wherein the removable transport assembly is to be configured to position substrate, to receive the electromagnetic radiation from the grade reflection tangent plane reflection of the polygonal mirror.
priorityDate 2013-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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