http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105027260-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-004 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3174 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2014-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105027260-B |
| titleOfInvention | Position correction amount arithmetic unit and bearing calibration and charged particle beam irradiation system |
| abstract | The invention provides a kind of irradiation position for being capable of precise calibration charged particle beam and the correction program of the charged particle beam irradiation position for the positional precision for improving depicting pattern, the correcting value arithmetic unit of charged particle beam irradiation position, charged particle beam irradiation system and the bearing calibration of charged particle beam irradiation position.The correction program of electron beam irradiation position is characterised by, control unit (22) is played a role as with lower unit：Charge density distribution arithmetic element, powered by resist replaces with resist (R) and the surface charge at the interface of mask substrate (M), and the charge density distribution of the surface charge to being substituted for carries out computing；Track arithmetic unit, computing is carried out based on charge density distribution to the track of charged particle；Margin of error arithmetic unit, the track based on charged particle carries out computing to the margin of error of the irradiation position of electron beam；And irradiation position correcting value arithmetic unit, computing is carried out to the correcting value of electron beam irradiation position based on the margin of error. |
| priorityDate | 2013-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.