Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
filingDate |
2013-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2018-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2018-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-104979311-B |
titleOfInvention |
Monitor configuration and forming method thereof |
abstract |
The present invention relates to monitor configurations and forming method thereof.According to one embodiment of present invention, a kind of method forming electronic device, which is included in workpiece, forms the first opening and the second opening.First aperture efficiency second opening is deeper.This method further comprises that packing material is formed in the first opening to form a part through via hole and form packing material in the second opening. |
priorityDate |
2012-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |