http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104968831-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-458 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32513 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2014-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104968831-B |
| titleOfInvention | Gas separation via adjustable separation walls |
| abstract | An apparatus for coating thin films on flexible substrates is described. The equipment includes a coating drum and a gas separation unit. The coating drum has an outer surface for guiding the flexible substrate through a first vacuum processing area and at least one second vacuum processing area. The gas separation unit is used for separating the first vacuum a processing area and at least a second vacuum processing area, and are adapted to form slits through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to pass the adjustment gas The position of the separation unit controls the fluid communication between the first and second treatment zones. |
| priorityDate | 2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.