http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104909581-B
Outgoing Links
Predicate | Object |
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classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 |
filingDate | 2015-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2019-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2019-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-104909581-B |
titleOfInvention | It is used to form the pre-treating method of the glass substrate of etching mask |
abstract | The present invention provides a kind of pre-treating method of glass substrate, after forming etching mask on the glass substrate that surface has metal wiring and the dielectric envelope being made of organic or inorganic material, in the case where being etched processing and the removing of etching mask, it can be in glass substrate whole surface, etching mask promptly residual removing residue hardly is removed, and the processing method by etching for forming etching mask method on the glass substrate for implement the pre-treating method and having the glass substrate of the etching mask formed using this method is provided.Before forming etching mask on the glass substrate that surface has metal wiring and the dielectric envelope being made of organic or inorganic material, to the glass substrate, implement defined lyophilised processing, alkali metal removing processing and silicic acid anhydride respectively. |
priorityDate | 2014-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 568.