| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24C1-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F26B3-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00 |
| filingDate |
2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-104853854-B |
| titleOfInvention |
Utilize the liquid film minimizing technology of high velocity beam |
| abstract |
The present invention relates to a kind of liquid film minimizing technology utilizing high velocity beam, comprising: wet washing step, utilize cleanout fluid cleaning object thing；And dry clean step, remove the described cleanout fluid residuing in described object and the polluter or the impurity that are contained in described cleanout fluid by injection sublimability particle simultaneously. |
| priorityDate |
2012-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |